Full metadata record
DC Field | Value | Language |
dc.contributor.author | 송문균 | en_US |
dc.date.accessioned | 2015-02-24T15:40:30Z | - |
dc.date.available | 2015-02-24T15:40:30Z | - |
dc.date.issued | 2004 | en_US |
dc.identifier.other | OAK-2015-04569 | en_US |
dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906731 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/6949 | - |
dc.description | Master | en_US |
dc.language | kor | en_US |
dc.publisher | 포항공과대학교 | en_US |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | DLI(Direct Liquid Injection) 공정을 이용한 HfO2와 Hf aluminate박막의 유기금속 화학증착 | en_US |
dc.title.alternative | Metal Organic Chemical Vapor Deposition of HfO2 and Hf Aluminate Thin Films Using a Direct Liquid Injection System | en_US |
dc.type | Thesis | en_US |
dc.contributor.college | 일반대학원 화학공학과 | en_US |
dc.date.degree | 2004-02 | en_US |
dc.type.docType | Thesis | - |
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