Extended universal and Scaling law for micro-sized RF gas breakdown
- Title
- Extended universal and Scaling law for micro-sized RF gas breakdown
- Authors
- 윤건수; 이민욱; 이재구
- Date Issued
- 2016-06-30
- Publisher
- Institute of Space and Plasma Sciences, National Cheng Kung University, Tainan, Taiwan
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/72118
- Article Type
- Conference
- Citation
- The 18th International Congress on Plasma Physic, 2016-06-30
- Files in This Item:
- There are no files associated with this item.
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