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Plasma Enhanced Atomic Layer Deposition of Ni
- Title
- Plasma Enhanced Atomic Layer Deposition of Ni
- Authors
- 김형준
- Date Issued
- 2007-11-01
- Publisher
- 한국재료학회
- Article Type
- Conference
- Citation
- 2007 년도 한국재료학회 추계학술대회 및 제 13회 신소재 심포지엄, 2007-11-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg