Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films
- Title
- Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films
- Authors
- 김형준
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/86810
- Article Type
- Conference
- Citation
- The 14th International Symposium on the Physics of Semiconductors and Applications
- Files in This Item:
- There are no files associated with this item.
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