Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Two-step electron beam lithography to fabricate 20 nm T-gate
- Title
- Two-step electron beam lithography to fabricate 20 nm T-gate
- Authors
- 정윤하
- Publisher
- IEEK
- Article Type
- Conference
- Citation
- IEEK Summer Conference 2006, page. 555 - 556
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 정윤하JEONG, YOON HA
- Dept of Electrical Enginrg