Removing 20nm ceramic particles using a supersonic Argon particle beam from a contoured Laval nozzle
- Title
- Removing 20nm ceramic particles using a supersonic Argon particle beam from a contoured Laval nozzle
- Authors
- 이진원
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/88416
- Article Type
- Conference
- Citation
- 1st ICMAP (Int'l Conf. on Microelectronics and Plasma Technology) Conference, page. 1
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