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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LEE, JEONG SOO | - |
| dc.contributor.author | IKSOO, PARK | - |
| dc.contributor.author | BAEK, SANGWON | - |
| dc.date.accessioned | 2019-04-08T02:55:02Z | - |
| dc.date.available | 2019-04-08T02:55:02Z | - |
| dc.date.created | 2019-03-11 | - |
| dc.date.issued | 2019-02-14 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/97147 | - |
| dc.publisher | KCS | - |
| dc.relation.isPartOf | 제26회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 한국반도체학술대회 | - |
| dc.title | The Effect of Carbon Pre-Silicidation Implant (C-PSI) on the Thermal Stability and the Contact Resistivity of Titanium Silicide (TiSi) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제26회 한국반도체학술대회 | - |
| dc.citation.conferenceDate | 2019-02-13 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 강원도 웰리힐리파크 | - |
| dc.citation.title | 제26회 한국반도체학술대회 | - |
| dc.contributor.affiliatedAuthor | LEE, JEONG SOO | - |
| dc.contributor.affiliatedAuthor | IKSOO, PARK | - |
| dc.contributor.affiliatedAuthor | BAEK, SANGWON | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg