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AN, JIHWAN(안지환)
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Dept of Mechanical Engineering(기계공학과)
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Date issued
2024
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KCI
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SCIE
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Article
Hydrogen Plasma-Assisted Atomic Layer Deposition of Ru with Low Oxygen Content
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KCI
Korean Journal of Chemical Engineering, vol. 41, no. 4, page. 1249 - 1254, 2024-02
Park, Geonwoo
;
Kim, Keunhoi
;
Shin, Jeong Woo
;
Han, Geongu
;
Go, Dohyun
;
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