엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용
KCI
- Title
- 엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용
- Authors
- KIM, KANGHYUN; LIM, GEUN BAE; KIM, JONG HYUN; NAM, HYORYUNG; KIM, SU HYEON
- Date Issued
- 2021-05
- Publisher
- 한국센서학회
- Abstract
- As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/106842
- ISSN
- 1225-5475
- Article Type
- Article
- Citation
- Journal of Sensor Science and Technology, vol. 30, no. 3, page. 170 - 174, 2021-05
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