Output Feedback Tracking Control for Piezo Actuated Positioning Stage with Hysteresis Compensation

Abstract

This paper presents an output feedback tracking control scheme for piezo-actuated positioning stage under hysteresis effect. The scheme employs a sliding mode observer as state observers. Hysteresis is compensated through an estimated hysterisis based on Bouc-Wen model. The proposed scheme shows superior performance compared to existing scheme in conducted simulations. The effectiveness of the proposed scheme is also demonstrated by experiment results.