Structural characterization of strained (Ba-0.5,Sr-0.5)TiO3 thin films grown on Si by synchrotron X-ray diffraction
SCIE
SCOPUS
- Title
- Structural characterization of strained (Ba-0.5,Sr-0.5)TiO3 thin films grown on Si by synchrotron X-ray diffraction
- Authors
- Jun, SJ; Kim, SS; Je, JH; Lee, JC
- Date Issued
- 2001-01
- Publisher
- TAYLOR & FRANCIS LTD
- Abstract
- Epitaxial (Ba-0.5,Sr-0.5)TiO3 (BST) thin films have been grown on Si substrate with a very thin yttria-stabilized zirconia (YSZ) buffer layer by pulsed-laser deposition. The epitaxially grown BST thin films experienced lattice distortion along the in-plane direction due to the tensile stress induced primarily by thermal stress during deposition. Crystallinity and microstructures of a strained BST thin films have been closely investigated using X-ray diffractometer, transmission electron microscope, and synchrotron X-ray.
- Keywords
- (Ba,Sr)TiO3; strain; synchrotron X-ray; RANDOM-ACCESS MEMORIES; LAYER
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/19250
- ISSN
- 1058-4587
- Article Type
- Article
- Citation
- INTEGRATED FERROELECTRICS, vol. 38, no. 1-4, page. 845 - 854, 2001-01
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- There are no files associated with this item.
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