Development of Roll Micromold System via Deep X-ray Lithography and Metal Electroforming Processes
SCIE
SCOPUS
- Title
- Development of Roll Micromold System via Deep X-ray Lithography and Metal Electroforming Processes
- Authors
- Bong-Kee Lee; Kwon, TH
- Date Issued
- 2010-06
- Publisher
- The Japan Society of Applied Physics
- Abstract
- In the present study, a novel roll-shaped micromold system, referred to as a roll micromold system (RMS), is proposed and developed by a deep X-ray lithography process and subsequent electroforming. The developed RMS consists of several cylindrical roll micromold modules (RMMs) including various cross-sectional microstructures along their circumferential surface. RMMs with different microstructures are assembled to construct the RMS, which can be utilized in roll-type micromolding processes for the continuous replication of more complicated microstructured sheets and/or films. As a representative example of an RMS, several copper RMMs having triangular, rectangular, and trapezoidal microstructures on their circumferential surface were precisely fabricated. The RMS was successfully obtained by assembling such RMMs. A rolling experiment utilizing the assembled RMS was also carried out to verify its usefulness. (C) 2010 The Japan Society of Applied Physics
- Keywords
- THERMOPLASTIC POLYMERS; MICROLENS ARRAYS; FABRICATION
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/25766
- DOI
- 10.1143/JJAP.49.06GN06
- ISSN
- 0021-4922
- Article Type
- Article
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 49, no. 6, page. 6GN06, 2010-06
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