Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas
SCIE
SCOPUS
- Title
- Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas
- Authors
- Lee, H; Kim, SB; Yi, C; Park, S; Yoo, SJ; Cho, M; Namkung, W
- Date Issued
- 2015-02
- Publisher
- IOP publishing
- Abstract
- An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4-1 mTorr and microwave power of 300-800 W. Electron temperature and ion density are dependent on the radial and axial position.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/27215
- DOI
- 10.1088/0963-0252/24/1/015031
- ISSN
- 0963-0252
- Article Type
- Article
- Citation
- PLASMA SOURCES SCIENCE & TECHNOLOGY, vol. 24, no. 1, page. 15031 - 15031, 2015-02
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- There are no files associated with this item.
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