DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, TW | - |
dc.contributor.author | Mitrofanov, O | - |
dc.contributor.author | Hsu, JWR | - |
dc.date.accessioned | 2016-04-01T08:50:03Z | - |
dc.date.available | 2016-04-01T08:50:03Z | - |
dc.date.created | 2009-06-01 | - |
dc.date.issued | 2005-10 | - |
dc.identifier.issn | 1616-301X | - |
dc.identifier.other | 2005-OAK-0000016731 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/28869 | - |
dc.description.abstract | Using high-aspect-ratio nanostructures fabricated via two-photon laser-scanning lithography, we examine the deformation of elastomeric stamps used in soft nanolithography and the fidelity of patterns and replicas made using these stamps. Two-photon laser-scanning lithography enables us to systematically regulate the aspect ratio and pattern density of the nanostructures by varying laser-scanning parameters such as the intensity of the laser beam, the scanning speed, the focal depth inside the resist, and the scanning-line spacing. Two commercially available stamp/mold materials with different moduli have been investigated. We find that the pattern-transfer fidelity is strongly affected by the pattern density. In addition, we demonstrate that true three-dimensional structures can be successfully replicated because of the flexible nature of elastomeric poly(dimethylsiloxane). | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | WILEY-V C H VERLAG GMBH | - |
dc.relation.isPartOf | ADVANCED FUNCTIONAL MATERIALS | - |
dc.subject | 2-PHOTON LITHOGRAPHY | - |
dc.subject | SURFACE-TENSION | - |
dc.subject | HIGH-RESOLUTION | - |
dc.subject | PHOTOPOLYMERIZATION | - |
dc.subject | MICROFABRICATION | - |
dc.subject | DEFORMATION | - |
dc.subject | PHOTORESIST | - |
dc.subject | FEATURES | - |
dc.subject | COLLAPSE | - |
dc.subject | STAMP | - |
dc.title | PATTERN-TRANSFER FIDELITY IN SOFT LITHOGRAPHY: THE ROLE OF PATTERN DENSITY AND ASPECT RATIO | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | - |
dc.identifier.doi | 10.1002/ADFM.2004002 | - |
dc.author.google | Lee, TW | - |
dc.author.google | Mitrofanov, O | - |
dc.author.google | Hsu, JWR | - |
dc.relation.volume | 15 | - |
dc.relation.issue | 10 | - |
dc.relation.startpage | 1683 | - |
dc.relation.lastpage | 1688 | - |
dc.contributor.id | 10154218 | - |
dc.relation.journal | ADVANCED FUNCTIONAL MATERIALS | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | ADVANCED FUNCTIONAL MATERIALS, v.15, no.10, pp.1683 - 1688 | - |
dc.identifier.wosid | 000232761500017 | - |
dc.date.tcdate | 2019-02-01 | - |
dc.citation.endPage | 1688 | - |
dc.citation.number | 10 | - |
dc.citation.startPage | 1683 | - |
dc.citation.title | ADVANCED FUNCTIONAL MATERIALS | - |
dc.citation.volume | 15 | - |
dc.contributor.affiliatedAuthor | Lee, TW | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 56 | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | SURFACE-TENSION | - |
dc.subject.keywordPlus | HIGH-RESOLUTION | - |
dc.subject.keywordPlus | FEATURES | - |
dc.subject.keywordPlus | STAMP | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
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