DC Field | Value | Language |
---|---|---|
dc.contributor.author | K.H. Kim | - |
dc.contributor.author | C.M. Jeon | - |
dc.contributor.author | S.H. Oh | - |
dc.contributor.author | C.G. Park | - |
dc.contributor.author | J.H. Lee | - |
dc.contributor.author | K.S. Lee | - |
dc.contributor.author | Jong-Lam Lee | - |
dc.date.accessioned | 2018-01-09T08:57:35Z | - |
dc.date.available | 2018-01-09T08:57:35Z | - |
dc.date.created | 2009-03-26 | - |
dc.date.issued | 2002-12 | - |
dc.identifier.issn | 1862-6351 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/40797 | - |
dc.description.abstract | The Au/Ni/Al/Ti/Ta ohmic contact (7.5 × 10-7 Ωcm2) on the AlGaN/GaN heterostructure was demonstrated through 700 °C annealing for 1 min. The nitride phases were identified as the TaN/TiN for Au/Ni/Al/Ti/Ta and TiN for Au/Ni/Al/Ti. The strong formation of interfacial nitrides appears to be responsible for the good ohmic contact behavior in the Au/Ni/Al/Ti/Ta metal scheme. The contact resistance was found to depend on the thickness of the nitride phases. © 2002 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | - |
dc.language | English | - |
dc.publisher | WILEY - VCH VERLAG | - |
dc.relation.isPartOf | PHYSICA STATUS SOLIDI (C) | - |
dc.title | MICROSTRUCTURAL ANALYSIS OF AU/NI/AL/TI/TA OHMIC CONTACT ON ALGAN/GAN HETEROSTRUCTURE | - |
dc.type | Article | - |
dc.identifier.doi | 10.1002/pssc.200390029 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | PHYSICA STATUS SOLIDI (C), v.0, no.1, pp.223 - 226 | - |
dc.identifier.wosid | 000189455300046 | - |
dc.citation.endPage | 226 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 223 | - |
dc.citation.title | PHYSICA STATUS SOLIDI (C) | - |
dc.citation.volume | 0 | - |
dc.contributor.affiliatedAuthor | C.G. Park | - |
dc.contributor.affiliatedAuthor | Jong-Lam Lee | - |
dc.identifier.scopusid | 2-s2.0-21844455307 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.type.docType | Proceedings Paper | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Ceramics | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
library@postech.ac.kr Tel: 054-279-2548
Copyrights © by 2017 Pohang University of Science ad Technology All right reserved.