Area Selective Atomic Layer Deposition of Transition Metals
- Title
- Area Selective Atomic Layer Deposition of Transition Metals
- Authors
- 김형준; 김우희; 이한보람
- Publisher
- California USA 2009
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/51663
- Article Type
- Conference
- Citation
- (ALD 2009) 9th International Conference on Atomic Layer Deposition
- Files in This Item:
- There are no files associated with this item.
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