Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam
- Title
- Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam
- Authors
- 이진원; 김인호; 김의재
- Date Issued
- 2011-06-15
- Publisher
- Clean tech
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/59936
- Article Type
- Conference
- Citation
- Nanotech 2011, 2011-06-15
- Files in This Item:
- There are no files associated with this item.
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