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Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Epitaxy
- Title
- Modeling and Analysis of the Parasitic Series Resistance in Raised Source/Drain FinFETs with Polygonal Epitaxy
- Authors
- 백창기
- Date Issued
- 2012-09-06
- Publisher
- International Conference on Simulation of Semiconductor Processes and Devices
- Article Type
- Conference
- Citation
- 2012 IEEE 17th International Conference on Simulation of Semiconductor Processes and Devices, 2012-09-06
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Related Researcher
- 백창기BAEK, CHANG KI
- Dept. Convergence IT Engineering