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DLI(Direct Liquid Injection) 공정을 이용한 HfO2와 Hf aluminate박막의 유기금속 화학증착
- Title
- DLI(Direct Liquid Injection) 공정을 이용한 HfO2와 Hf aluminate박막의 유기금속 화학증착
- Authors
- 송문균
- Date Issued
- 2004
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906731
https://oasis.postech.ac.kr/handle/2014.oak/6949
- Article Type
- Thesis
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