DC Field | Value | Language |
---|---|---|
dc.contributor.author | SEYEONG, SEOK | - |
dc.contributor.author | Sanghee Moon | - |
dc.contributor.author | LIM, GEUNBAE | - |
dc.date.accessioned | 2018-12-28T06:34:51Z | - |
dc.date.available | 2018-12-28T06:34:51Z | - |
dc.date.created | 2018-12-12 | - |
dc.date.issued | 2018-12 | - |
dc.identifier.issn | 0914-4935 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/94581 | - |
dc.description.abstract | In this work, a novel micromachined monolithic triaxis gyroscope with an advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of 'tree-shaped' coupling springs. The simulated driving and x-, y-, and z-axis sensing resonant frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and a scale factor of 7 mV/deg/s. | - |
dc.language | English | - |
dc.publisher | M Y U Scientific Publishing Division | - |
dc.relation.isPartOf | Sensors and Materials | - |
dc.title | Design, Analysis, and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism | - |
dc.type | Article | - |
dc.identifier.doi | 10.18494/SAM.2018.2022 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | Sensors and Materials, v.30, no.12, pp.2823 - 2831 | - |
dc.identifier.wosid | 000452657600006 | - |
dc.citation.endPage | 2831 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 2823 | - |
dc.citation.title | Sensors and Materials | - |
dc.citation.volume | 30 | - |
dc.contributor.affiliatedAuthor | SEYEONG, SEOK | - |
dc.contributor.affiliatedAuthor | LIM, GEUNBAE | - |
dc.identifier.scopusid | 2-s2.0-85059210552 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | gyroscope | - |
dc.subject.keywordAuthor | simulation | - |
dc.subject.keywordAuthor | prototype development | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Materials Science | - |
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