Design, Analysis, and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism
SCIE
SCOPUS
- Title
- Design, Analysis, and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism
- Authors
- SEYEONG, SEOK; Sanghee Moon; LIM, GEUNBAE
- Date Issued
- 2018-12
- Publisher
- M Y U Scientific Publishing Division
- Abstract
- In this work, a novel micromachined monolithic triaxis gyroscope with an advanced anchor mechanism is designed and its structural characteristics are analyzed. Micromachined gyroscopes are usually packed in small packages, causing a high squeeze film damping effect that reduces the quality factor of out-of-plane vibration, resulting in lowered out-of-plane sensitivity. The proposed gyroscope has a four-mass single structure wherein the opposing masses vibrate in the opposite direction perpendicular to the direction they face, with the help of 'tree-shaped' coupling springs. The simulated driving and x-, y-, and z-axis sensing resonant frequencies are 19946, 20227, 20294, and 20361 Hz, respectively. Also, the prototype of the gyroscope was fabricated and tested. It showed a driving Q-factor of 106 and a scale factor of 7 mV/deg/s.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/94581
- DOI
- 10.18494/SAM.2018.2022
- ISSN
- 0914-4935
- Article Type
- Article
- Citation
- Sensors and Materials, vol. 30, no. 12, page. 2823 - 2831, 2018-12
- Files in This Item:
-
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.