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Nanosheet Number and Width Optimization of Multi Stacked NanoSheet FET for 7-nm Node SoC Application
- Title
- Nanosheet Number and Width Optimization of Multi Stacked NanoSheet FET for 7-nm Node SoC Application
- Authors
- BAEK, ROCK HYUN; Jun-Sik Yoon; Jinsu Jeong; Seunghwan Lee
- Date Issued
- 2018-09-12
- Publisher
- Japanese Society of Applied Physics
- Article Type
- Conference
- Citation
- 2018 International Conference on Solid State Devices and Materials (SSDM 2018), page. 877 - 878, 2018-09-12
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg