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The Effect of Carbon Pre-Silicidation Implant (C-PSI) on the Thermal Stability and the Contact Resistivity of Titanium Silicide (TiSi)
- Title
- The Effect of Carbon Pre-Silicidation Implant (C-PSI) on the Thermal Stability and the Contact Resistivity of Titanium Silicide (TiSi)
- Authors
- LEE, JEONG SOO; IKSOO, PARK; BAEK, SANGWON
- Date Issued
- 2019-02-14
- Publisher
- KCS
- Article Type
- Conference
- Citation
- 제26회 한국반도체학술대회, 2019-02-14
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Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg